Atomic Layer Deposition: Process Demonstration

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MS

Dec 02, 2019

This course was very helpful to understand the basic fabrication techniques for making micro and nanodevices. I can confidently use equipment in my laboratory after doing this course. Thank you

MJ

Apr 11, 2020

Its a really nice informative course. But Etching was really boring part and difficult to understand compared to other parts of the module. If that can be made more friendly it would be great.

从本节课中
Nanofabrication: Vapor Deposition
We will look at some techniques for making things with nanotechnology using thin film techniques; in this module you will learn to describe and compare atomic layer deposition, chemical vapor deposition, and plasma-enhanced chemical vapor deposition.

教学方

  • Nan M. Jokerst

    Nan M. Jokerst

    J. A. Jones Professor of Electrical and Computer Engineering
  • Carrie Donley

    Carrie Donley

    Director of CHANL (Chapel Hill Analytical and Nanofabrication Laboratory)
  • James Cahoon

    James Cahoon

    Assistant Professor
  • Jacob Jones

    Jacob Jones

    Professor

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